High Frequency Probe Unit
The high frequency probe unit is equipped with a rotation mechanism which allows close proximity between probes enables testing of various pad arrangements. High frequency probes such as the ACP series by Form Factor (formerly Cascade Microtech) and many others are supported.
Axis | E2V6151 (2 axis) |
E3V6151 (3 axis) |
E4V6151 (4 axis) |
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Max. Test Area | 22.8 x 18.9″ (580x480mm) | ||
Clamp System | Pneumatic Clamp | ||
Rotate Radius | 180° | ||
Repeatable Accuracy X-Y | ±0.16mil (±4µm) | ||
Repeatable Accuracy θ | 1° | ||
Air Requirement | Pressure: 0.5Mpa Consumption: 0.12ft³/min (3.5ℓ/min) |
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Power Supply | Single Phase AC200-240V 10A 50/60Hz |
Single Phase AC200-240V 12A 50/60Hz |
Single Phase AC200-240V 15A 50/60Hz |
Weight *excluding measurement meter |
3307lbs. (1500kg) |
3329lbs. (1510Kg) |
3351lbs. (1520Kg) |
Dimensions |
System Requirements | 1) Control PC & Monitor 2) Meter
Please contact our sales for details. Meters to be purchased separately. |
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Operating condition | · Operating Conditions: 70-75°F (21-24°C), 30-70% relative humidity † No condensation, dust, vibration nor any corrosive gas · Atmospheric Dew Point: -14°C or below (at 0.7Mpa, dew point is 15°C or below) · Oil Mist Concentration: 1mg/㎥ (ANR) or below |